The AR100 has been designed to replace the Equipe Technologies ATM100 robot line that was designed in 1990. The ATM100 design has not been significantly updated for 25 years and still contains obsolete components which are difficult to replace. The ATM100  robot was also manufactured under name of PRI Automation, then Brooks Automation, and now Milara (AxM100).  The table below provides a comparison between the WaferPath AR100 and the ATM100 it replaces.

The simpler wiring design for the AR100 robot allows for smaller more compact connectors than the ATM100 robot. The same interface signals are available, and for retrofit into existing wiring designs, WaferPath offers a cable harness to match the ATM100. The host interface is via standard RS-232 9-pin connector.

Connection

• Serial RS232

• IO 8 inputs 8 outputs, Motor Off, curtain.

• Teach Terminal

• Power direct or through external power supply

• Two Vacuum lines

The command language for the AR100 robot is upward compatible with the ATM100 robot.  Existing macros from the ATM100 will run unmodified on the AR100.  We have added commands to access new features of the AR100, and done so in a compatible way. A key feature to improve the programing language was the addition of an IF conditional which replaces the often unclear CMP/JMP conditional sequence. Teaching has been enhanced and is easier and faster.  Wafer scanning is faster and accomplished in a single pass, characterizing the top edge, bottom edge and thickness of the found wafers. Cross-slotted and double-slotted wafers are detected. Diagnostic information can be logged or saved internal to the robot and allows for detailed problem analysis if needed.    These improvements, and more, enhance the user experience, making the AR100 not only an ideal robot for upgrading legacy tools, but also ideal robot for new systems.

The AR100 implements a new motion engine that generates smooth, fast, and precise motion. Dynamic control of the motion gains ensure smooth motion start, while still allowing for high speed. The control electronics have been simplified and distributed to minimize moving cables which makes the robot more reliable. Once the AR100 is physically installed, all configuration and setup is done through software commands.  No mechanical end-stop, limit switch adjustments requiring a screwer driver or other tools are needed,

Similarly, the robot can be deployed with either a dual or single end-effector and all position adjustments made through software setup. In addition, new software commands have been added to simplify the teaching process. As an example, the MCS command is used for fine adjustments to a station position. A limit is imposed on the size of adjustment to make this operation less error prone.